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Plasma ashing
Plasma ashing In semiconductor manufacturing plasma ashing is the process of removing the photoresist from an etched wafer. Using a plasma source, a monatomic reactive species is ...
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Talk:Plasma ashing
Talk:Plasma ashing "Plasma Ashing" and "Fluorine" does not really fit together ... fluorine containing precursors are broadly used for "Plasma Etching" / "Thermal Ething" e.g. in ...
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Category:Plasma processing
Category:Plasma processing Pages in category "Plasma processing" There are 14 pages in this ... tungsten arc welding P Physical vapor deposition Plasma arc welding P cont. Plasma ashing Plasma cutting Plasma etching Plasma functionalization ...
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User:BorgQueen/science
... ash pits ash plumes ash sluices ashfalls ashing asperity asphalt felt as-received basis as ... the parties confined groundwater confinement of fusion plasma confiscatory rates congestion management program congestion mitigation ... battery magnet wires magnetic ballasts magnetic confinement plasma physics research magnetic confinement magnetic inclination magnetic ... plant condensate plant kingdom plant-use electricity plasma hearth furnace proces plasma melter technology plastic failure plastic film ...
http://en.wikipedia.org/wiki/User:BorgQueen/science - 305k - Cached - Similar pages
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Semiconductor fabrication
... processing, the remaining photoresist is removed by plasma ashing. Modification of electrical properties has historically consisted ... or decreased ) conductivity) Dry Etching Wet Etching Plasma ashing Thermal treatments Rapid thermal anneal Furnace anneals ...
http://en.wikipedia.org/wiki/Semiconductor_fabrication - 26k - Cached - Similar pages
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User:Kjkolb/Science
... Ash mono-fill Ash pit Ash sluice Ashing Asperity Asphalt felt Assay kit Assigned reserve ... Conference of the Parties Confinement of fusion plasma Confiscatory rate Congressional energy committees Conjunctive use ... Plant condensate Plant kingdom Plant-use electricity Plasma hearth furnace process , Plasma melter technology Plastic cement Plastic failure Plastic ...
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Dry etching
... to a bombardment of ions (usually a plasma of nitrogen, chlorine and boron trichloride) that ... dry etch process. However, also the term plasma ashing may be used.
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Fluorine (translated from French)
... products, The monoatomic fluorine is used for "plasma ashing" in the manufacture of semiconductors, With others ...
http://fr.wikipedia.org/wiki/Fluor - 9k - Cached (French) - Wikipedia (French) - Similar pages
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Category:Semiconductor device fabrication
... formaldehyde resin Photolithography Photoresist Physical vapor deposition Plasma ashing Pulsed laser deposition R Rapid thermal anneal ...
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