Rapid thermal anneal
Rapid thermal anneal Rapid thermal anneal (RTA) is a process used ...
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Anneal   (translated from German)
Anneal Anneal is a procedure, with in a construction ... to one - usually inadvertent - Birefringence lead. A rapid cooling through Deter leads to it, that ... way won Annealing glass against mechanical and thermal loads during the use in the comparison ... iron With Cast iron one understands under Anneal long-term Glowing at temperatures between ...
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Semiconductor fabrication
... These doping processes are followed by furnace anneal or in advanced devices, by rapid thermal anneal (RTA) which serve to activate the implanted ... conductivity) Dry Etching Wet Etching Plasma ashing Thermal treatments Rapid thermal anneal Furnace anneals ...
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High-k Dielectric
... °C could therefore cause statistical fluctuations in thermal energy, which would adversely affect the desired ... survive sufficiently high temperatures such as a Rapid thermal anneal to 1000 °C for say, 10 s ...
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Category:Semiconductor device fabrication
... company Focused ion beam Foundry model Furnace anneal G Gate count I Integrated circuit encapsulation ... deposition Plasma ashing Pulsed laser deposition R Rapid thermal anneal Resist S Semiconductor Equipment and Materials International ...
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