Reactive ion etching
Reactive ion etching Reactive ion etching (RIE) is a technology using ...
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Deep reactive ion etching
Deep reactive ion etching Deep Reactive Ion Etching or DRIE is a highly ...
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Talk:Reactive ion etching
Talk:Reactive ion etching To expand the stub: I added the ...
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Reactivity ion etching   (translated from Japanese)
Reactivity ion etching Reactivity ion Etching(Reactive Ion Etching; RIE)Dry etchingIt is ...
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Ion beam
Ion beam An ion beam is a stream of charged particles ... has many uses in electronics manufacturing (principally ion implantation) and other industries. Today's ion beam sources are typically derived from the ... NASA in the 1960s. One type of ion beam source is the duoplasmatron. Ion ...
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Plasma-corrode   (translated from German)
... is here the use of structuring plasma etching processes admits in that Halbleitertechnik . Those isotropic ... 45 GHz) ignited and such a highly reactive, corrode-active plasma produces. In practice the ... corrosive gases, in order to increase the etching rate. Depending upon corrosive medium one achieves ... C-haltigen corrosive gases parallel to the etching process. Examples are adding from oxygen to ... used as corrosive gas. In all plasma etching processes, which avail themselves of fluorhaltiger ...
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Plasma (physics)
... energy transfer, it is possible for the ion temperature to be very different from (usually ... temperature is typically several thousand degrees. The ion temperature in a cold plasma is often ... include plasma-enhanced chemical vapor deposition, plasma ion doping , and reactive ion etching. A hot plasma, on the ...
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Semiconductor fabrication
... consist primarily of etch processes, both wet etching and dry etching such as reactive ion etch (RIE). Chemical-mechanical planarization (CMP) is ... washed away by a developer solution. After etching or other processing, the remaining photoresist ...
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Ohmic contact
... a contact metal to be conductive, non-reactive, thermally stable, electrically stable and low-stress ... Surface cleaning may be performed by sputter-etching, chemical etching, reactive gas etching or ion milling. For example, the ...
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Semiconductor technology   (translated from German)
... into the material ( Dotierung ). This happens through Ion implantation or Diffusion . The foreign atoms become ... different elements or as victim layers for etching processes are produced Through Physical gaseous phase ... remove or from separated layers determined ranges Etching technique begun. One differentiates between anisotropic (direction-independent) and isotropic (direction-controlled) etching techniques. That anisotrope Plasma-corrode (drying-corroded, reactive ions corroding, RIE) the process prevailing ...
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